JPS6192046U - - Google Patents
Info
- Publication number
- JPS6192046U JPS6192046U JP17672984U JP17672984U JPS6192046U JP S6192046 U JPS6192046 U JP S6192046U JP 17672984 U JP17672984 U JP 17672984U JP 17672984 U JP17672984 U JP 17672984U JP S6192046 U JPS6192046 U JP S6192046U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- gas
- semiconductor
- flowed
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17672984U JPS6192046U (en]) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17672984U JPS6192046U (en]) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192046U true JPS6192046U (en]) | 1986-06-14 |
Family
ID=30734322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17672984U Pending JPS6192046U (en]) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192046U (en]) |
-
1984
- 1984-11-22 JP JP17672984U patent/JPS6192046U/ja active Pending
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